JPH0158660U - - Google Patents
Info
- Publication number
- JPH0158660U JPH0158660U JP15239787U JP15239787U JPH0158660U JP H0158660 U JPH0158660 U JP H0158660U JP 15239787 U JP15239787 U JP 15239787U JP 15239787 U JP15239787 U JP 15239787U JP H0158660 U JPH0158660 U JP H0158660U
- Authority
- JP
- Japan
- Prior art keywords
- processing chamber
- wafer
- holder
- chamber
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 7
- 230000001678 irradiating effect Effects 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987152397U JPH0745561Y2 (ja) | 1987-10-05 | 1987-10-05 | イオン処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987152397U JPH0745561Y2 (ja) | 1987-10-05 | 1987-10-05 | イオン処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0158660U true JPH0158660U (en]) | 1989-04-12 |
| JPH0745561Y2 JPH0745561Y2 (ja) | 1995-10-18 |
Family
ID=31427284
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987152397U Expired - Lifetime JPH0745561Y2 (ja) | 1987-10-05 | 1987-10-05 | イオン処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0745561Y2 (en]) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6280268A (ja) * | 1985-10-04 | 1987-04-13 | Hitachi Ltd | 微細加工用真空装置 |
-
1987
- 1987-10-05 JP JP1987152397U patent/JPH0745561Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6280268A (ja) * | 1985-10-04 | 1987-04-13 | Hitachi Ltd | 微細加工用真空装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0745561Y2 (ja) | 1995-10-18 |